Energy Dispersive X-ray Spectroscopy (EDS)

Energy Dispersive X-ray Spectroscopy (EDS) is an analytical capability that can be coupled with several applications including Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM).

EDS, when combined with these imaging tools, can provide elemental analysis on areas as small as nanometers in diameter. The impact of the electron beam on the sample produces x-rays that are characteristic of the elements found on the sample. With EDS, you can determine the elemental composition of individual points or map out the lateral distribution of elements from select areas.

View Application Notes

Ideal Uses for EDS Analysis		Relevant Industries for EDS Analysis
Imaging and elemental composition of small areas Identification/mapping of elements present in defects		Aerospace Automotive Biomedical/biotechnology Compound Semiconductor Data Storage Defense Displays Electronics Industrial Products Lighting Pharmaceutical Photonics Polymer Semiconductor Solar Photovoltaics Telecommunications

Strengths of EDS Analysis		Limitations of EDS Analysis
Quick, “first look” analysis Versatile, inexpensive, and widely available Quantitative for some samples (flat, polished, homogeneous)		Semi-quantification for samples that are not flat, polished, and homogeneous Size restrictions on samples Samples must be vacuum compatible (not ideal for organic material) Analysis (and coating) may spoil subsequent surface analysis Limited sensitivity for low-Z elements

Application Notes

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EDS Technical Capabilities

Signal Detected:
Characteristic x-rays

Elements Detected:
B-U

Detection Limits:
0.1 – 1 at%

Depth Resolution:
0.5 – 3 μm

Imaging/Mapping:
Yes

Lateral Resolution/Probe Size:
>=0.3 μm