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Techniques & Services

Scanning Electron Microscopy (SEM)

Scanning Electron Microscopy (SEM) rasters a focused electron beam across a sample surface, providing high-resolution and long-depth-of-field images of the sample surface. SEM is one of the most widely used analytical tools in industry due to the extremely detailed images it can provide. Coupled to an auxiliary Energy Dispersive X-ray Spectroscopy (EDS) detector, this technique also offers elemental identification of nearly the entire periodic table.

Evans Analytical Group® (EAG) uses SEM to help a wide range of clients whenever an optical microscope cannot provide the necessary image resolution. Applications include failure analysis, dimensional analysis, process characterization, reverse engineering, and particle identification. This expertise and range of experience prove invaluable to our clients. Moreover, person-to-person service ensures good communication of the results and their implications. In fact, customers are often present during the analysis, so there is an immediate sharing of information and an ongoing rapport that builds trust and confidence in the process.

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Ideal Uses for SEM Analysis Relevant Industries for SEM Analysis
  • High resolution images
  • Elemental microanalysis and particle characterization
  • Aerospace
  • Automotive
  • Biomedical/biotechnology
  • Compound Semiconductor
  • Data Storage
  • Defense
  • Displays
  • Electronics
  • Industrial Products
  • Lighting
  • Pharmaceutical
  • Photonics
  • Polymer
  • Semiconductor
  • Solar Photovoltaics
  • Telecommunications
Strengths of SEM Analysis Limitations of SEM Analysis
  • Rapid, high-resolution imaging
  • Quick identification of elements present
  • Good depth of field
  • Versatile platform that supports many other tools
  • Vacuum compatibility typically required
  • May  need to etch for contrast
  • SEM may spoil sample for subsequent analyses
  • Size restrictions may require cutting the sample
  • Ultimate resolution is a strong function of the sample and preparation

Application Notes

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SEM Technical Capabilities

Signal Detected:
Secondary & backscattered electrons and x-rays

Elements Detected:
B-U (EDS mode)

Detection Limits:
0.1 - 1 at%

Depth Resolution:
0.5 - 3 µm (EDS)

Imaging/Mapping:
Yes

Lateral Resolution/Probe Size:
15 - 45 Angstrom